The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Jun. 25, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Akihito Hashimoto, Saitama, JP;
Satoshi Maruyama, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a measurement apparatus that includes a movable stage and measures a position of a mark on the stage, comprising an imaging device including a plurality of pixels arranged at a pitch and imaging the mark, a driving device changing a relative position between the stage and the imaging device, a measurement device measuring the relative position, and a processor obtaining the position of the mark based on a plurality of images respectively obtained by the imaging device at a plurality of relative positions between the stage and the imaging device that are different from each other and associated with the pitch, wherein the processor is configured to obtain, based on a deviation with respect to one of the plurality of relative positions, a target relative position with respect to another of the plurality of relative positions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile