The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
May. 02, 2014
Applicant:
Silicon Microstructures, Inc., Milpitas, CA (US);
Inventor:
Holger Doering, Sunnyvale, CA (US);
Assignee:
Silicon Microstructures, Inc., Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/02 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0047 (2013.01); G01L 9/0051 (2013.01); G01L 19/0618 (2013.01);
Abstract
Pressure sensors having vertical diaphragms or membranes. A vertical diaphragm may be located in a first silicon wafer between a first and second cavity, where the first and second cavities are covered by a second silicon wafer. One or more active or passive devices or components may be located on a top of the vertical diaphragm.