The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
May. 28, 2015
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Toru Aramaki, Yokohama, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01B 11/24 (2006.01); G05B 19/401 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G05B 19/401 (2013.01); G05B 2219/37577 (2013.01);
Abstract
Provided is a shape measuring apparatus that is capable of suppressing adverse effects on measurement accuracy. A probe is provided with an illumination optical system that irradiates an object with light and an image capturing device that detects light reflected by the object. A rotation mechanism that rotates the probe is disposed at a position distanced from a rotation axis line. Attitude of the probe) relative to the object can be changed in accordance with the rotation of the probe. Signals detected by the image capturing device are calculated by a shape information acquisition unit.