The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Oct. 26, 2012
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Daniel Gene Smith, Tucson, AZ (US);
Michael Sogard, Menlo Park, CA (US);
Assignee:
Nikon Corporation, Tokyo, JP;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F21V 7/22 (2006.01); F21V 7/00 (2006.01); G03F 7/20 (2006.01); F21V 7/04 (2006.01);
U.S. Cl.
CPC ...
F21V 7/0033 (2013.01); G03F 7/70116 (2013.01); G03F 7/70566 (2013.01);
Abstract
A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.