The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
May. 06, 2014
Applicant:
Wacker Chemie Ag, Munich, DE;
Inventor:
Dirk Weckesser, Mehring, DE;
Assignee:
Wacker Chemie AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/44 (2006.01); C23C 16/44 (2006.01); C01B 33/035 (2006.01); C23C 16/24 (2006.01); C23C 16/442 (2006.01); B24C 1/08 (2006.01); B24C 11/00 (2006.01); C01B 33/027 (2006.01); B01D 45/16 (2006.01); B01D 50/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4407 (2013.01); B01D 45/16 (2013.01); B01D 50/002 (2013.01); B24C 1/086 (2013.01); B24C 11/00 (2013.01); C01B 33/027 (2013.01); C01B 33/035 (2013.01); C23C 16/24 (2013.01); C23C 16/442 (2013.01); C23C 16/4412 (2013.01);
Abstract
Silicon deposited by CVD and/or silico dust is removed from a polycrystalline silicon deposition reactor component by abrasion with silicon-containing particles in a gas stream.