The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
Apr. 29, 2011
Applicants:
Gerd Hoffmann, Bruchkoebel, DE;
Alexander Wolff, Kleinostheim, DE;
Inventors:
Gerd Hoffmann, Bruchkoebel, DE;
Alexander Wolff, Kleinostheim, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/24 (2006.01); C23C 14/00 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/0021 (2013.01); C23C 14/562 (2013.01); C23C 14/564 (2013.01);
Abstract
A gas lance unit configured for a reactive deposition process with a plurality of spaced apart crucibles, wherein spaces are provided between the crucibles, is described. The gas lance unit includes a gas guiding tube having one or more outlets for providing a gas for the reactive deposition process, and a condensate guiding element for guiding a condensate, particularly an aluminum condensate, to one or more positions above the spaces.