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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9728659 B1

PDFFull Text
Date of Patent:
Aug. 08, 2017

Filed:

Sep. 30, 2015

Spad device with radiation blocking rings and vias and related arrays and methods

Applicants:

Stmicroelectronics (Research & Development) Limited, Marlow Bucks, GB;

Stmicroelectronics (Grenoble 2) Sas, Grenoble, FR;

Inventors:

Flavien Hirigoyen, Grenoble, FR;

Bruce Rae, Edinburgh, GB;

Gaelle Palmigiani, Autrans, FR;

Stuart McLeod, Edinburgh, GB;

Assignees:

STMICROELECTRONICS (RESEARCH & DEVELOPMENT) LIMITED, Marlow Bucks, GB;

STMICROELECTRONICS (GRENOBLE 2) SAS, Grenoble, FR;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Victor A Mandala

Assistant Examiner:

Regan J Rundio

Int. Cl.
CPC ...
H01L 31/107 (2006.01); H01L 27/144 (2006.01); H01L 27/146 (2006.01); H01L 31/18 (2006.01); H01L 31/0232 (2014.01); H01L 31/0224 (2006.01); G01J 1/44 (2006.01); G01T 1/24 (2006.01); H01L 31/02 (2006.01); H01L 31/0216 (2014.01); G01J 1/42 (2006.01); H01L 27/148 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02327 (2013.01); G01J 1/4228 (2013.01); G01J 1/44 (2013.01); G01T 1/248 (2013.01); H01L 27/1443 (2013.01); H01L 27/1446 (2013.01); H01L 27/1461 (2013.01); H01L 27/14603 (2013.01); H01L 27/14609 (2013.01); H01L 27/14623 (2013.01); H01L 27/14625 (2013.01); H01L 27/14636 (2013.01); H01L 27/14643 (2013.01); H01L 31/02027 (2013.01); H01L 31/02164 (2013.01); H01L 31/107 (2013.01); H01L 31/18 (2013.01); H01L 27/14818 (2013.01);
Abstract

A Single-Photon Avalanche Diode (SPAD) device an active region configured to detect incident radiation, a first radiation blocking ring surrounding the active region, and a radiation blocking cover configured to shield part of the active region from the incident radiation. The radiation blocking cover is configured to define a second radiation blocking ring vertically spaced apart from the first radiation blocking ring. The SPAD device may include radiation blocking vias extending between the first and second radiation blocking rings.

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