The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Jan. 25, 2012
Applicants:
Klaus Elian, Alteglofsheim, DE;
Franz-peter Kalz, Regensburg, DE;
Horst Theuss, Wenzenbach, DE;
Inventors:
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 29/66 (2006.01); B81C 1/00 (2006.01); G01P 15/12 (2006.01); G01L 1/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/84 (2013.01); B81C 1/00246 (2013.01); G01L 1/20 (2013.01); G01P 15/124 (2013.01); B81B 2201/025 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0292 (2013.01); B81B 2203/0361 (2013.01);
Abstract
A sensor device includes a semiconductor chip. The semiconductor chip has a sensing region sensitive to mechanical loading. A pillar is mechanically coupled to the sensing region.