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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9728404 B1

PDFFull Text
Expired
Date of Patent:
Aug. 08, 2017

Filed:

Aug. 18, 2015

Method of growing nitride semiconductor layer, nitride semiconductor device, and method of fabricating the same

Applicant:

Seoul Viosys Co., Ltd., Ansan-si, KR;

Inventors:

Woo Chul Kwak, Ansan-si, KR;

Seung Kyu Choi, Ansan-si, KR;

Jae Hoon Song, Ansan-si, KR;

Chae Hon Kim, Ansan-si, KR;

Jung Whan Jung, Ansan-si, KR;

Assignee:

SEOUL VIOSYS CO., LTD., Ansan-si, KR;

Attorney:

Perkins Coie LLP

Primary Examiner:

Galina Yushina

Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 25/20 (2006.01); C30B 29/40 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0254 (2013.01); C30B 25/20 (2013.01); C30B 29/406 (2013.01); H01L 21/0242 (2013.01); H01L 21/0262 (2013.01); H01L 21/02389 (2013.01); H01L 21/02433 (2013.01); H01L 21/02458 (2013.01); H01L 29/2003 (2013.01);
Abstract

Exemplary embodiments of the present invention provide a method of growing a nitride semiconductor layer including growing a gallium nitride-based defect dispersion suppressing layer on a gallium nitride substrate including non-defect regions and a defect region disposed between the non-defect regions, and growing a gallium nitride semiconductor layer on the defect dispersion suppressing layer.

Find Patent Forward Citations

Kwak, Woo. (2017). Method of growing nitride semiconductor layer, nitride semiconductor device, and method of fabricating the same (U.S. Patent No. 9728404). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9728404

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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