The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2017

Filed:

Jul. 29, 2016
Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventors:

Imran Ahmed Bhutta, Moorestown, NJ (US);

Tomislav Lozic, Gilbert, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/46 (2006.01); H01J 7/24 (2006.01); H01J 37/32 (2006.01); H03F 3/195 (2006.01); H03F 1/02 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32174 (2013.01); H01J 37/32146 (2013.01); H01J 37/32183 (2013.01); H01J 37/32935 (2013.01); H01L 21/02274 (2013.01); H01L 21/31116 (2013.01); H03F 1/0222 (2013.01); H03F 1/0233 (2013.01); H03F 3/195 (2013.01); H05H 1/46 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01); H03F 2200/387 (2013.01); H03F 2200/451 (2013.01); H03F 2200/462 (2013.01); H03F 2200/471 (2013.01); H05H 2001/4645 (2013.01); H05H 2001/4682 (2013.01);
Abstract

In one embodiment, an RF generator includes an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to receive at the RF input an RF signal from an RF source; receive at the DC input a DC voltage from a DC source; and provide an output power at the RF output; and a control unit operably coupled to the DC source and the RF source, the control unit configured to receive a power setpoint indicative of a desired output power at the RF output; determine a power dissipation at the RF generator; alter the DC voltage to decrease the power dissipation at the RF generator; and alter the RF signal to enable the output power at the RF output to be substantially equal to the power setpoint.


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