The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2017

Filed:

Feb. 14, 2014
Applicant:

Halliburton Energy Services, Inc., Houston, TX (US);

Inventors:

James M Price, The Woodlands, TX (US);

Aditya B. Nayak, Humble, TX (US);

David L. Perkins, The Woodlands, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/00 (2006.01); G05B 19/4099 (2006.01); G01J 3/28 (2006.01); G01N 21/31 (2006.01); B29D 11/00 (2006.01); G01N 21/84 (2006.01); G02B 5/28 (2006.01); B32B 3/26 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4099 (2013.01); B29D 11/0073 (2013.01); B32B 3/266 (2013.01); G01J 3/28 (2013.01); G01N 21/31 (2013.01); G01N 21/8422 (2013.01); G02B 5/285 (2013.01); G02B 5/287 (2013.01); B32B 2307/40 (2013.01); B32B 2307/418 (2013.01); B32B 2307/732 (2013.01); B32B 2551/00 (2013.01); G01N 2021/8438 (2013.01); G05B 2219/49023 (2013.01);
Abstract

Technologies are described for monitoring characteristics of layers of integrated computational elements (ICEs) during fabrication using an in-situ spectrometer operated in step-scan mode in combination with lock-in or time-gated detection. As part of the step-scan mode, a wavelength selecting element of the spectrometer is discretely scanned to provide spectrally different instances of probe-light, such that each of the spectrally different instances of the probe-light is provided for a finite time interval. Additionally, an instance of the probe-light interacted during the finite time interval with the ICE layers includes a modulation that is being detected by the lock-in or time-gated detection over the finite time interval.


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