The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Sep. 14, 2010
Applicants:
Koji Ichikawa, Toyonaka, JP;
Hiromu Sakamoto, Ibaraki, JP;
Masako Sugihara, Nishinomiya, JP;
Takashi Hiraoka, Hannan, JP;
Inventors:
Koji Ichikawa, Toyonaka, JP;
Hiromu Sakamoto, Ibaraki, JP;
Masako Sugihara, Nishinomiya, JP;
Takashi Hiraoka, Hannan, JP;
Assignee:
SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01);
Abstract
A photoresist composition comprising an acid generator and a resin comprising a structural unit derived from a monomer represented by the formula (1):