The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Jan. 09, 2015
University of Electronic Science and Technology of China, Chengdu, Sichuan, CN;
Xiaosong Du, Sichuan, CN;
Luhua Cheng, Sichuan, CN;
Penglin Wu, Sichuan, CN;
Huan Yuan, Sichuan, CN;
Yadong Jiang, Sichuan, CN;
Ze Wu, Sichuan, CN;
Yi Li, Sichuan, CN;
Dong Qiu, Sichuan, CN;
University of Electronic Science and Technology of China, Chengdu, Sichuan, CN;
Abstract
A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.