The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2017

Filed:

Sep. 03, 2012
Applicants:

Masahide Tamura, Toyama, JP;

Osamu Kawasaki, Toyama, JP;

Takayuki Nakano, Toyama, JP;

Shouhei Niikawa, Toyama, JP;

Hidekazu Yano, Toyama, JP;

Tetsuji Imamura, Toyama, JP;

Inventors:

Masahide Tamura, Toyama, JP;

Osamu Kawasaki, Toyama, JP;

Takayuki Nakano, Toyama, JP;

Shouhei Niikawa, Toyama, JP;

Hidekazu Yano, Toyama, JP;

Tetsuji Imamura, Toyama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01P 15/12 (2006.01); G01P 15/18 (2013.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); G01C 19/5733 (2012.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01C 19/56 (2013.01); G01C 19/5733 (2013.01); G01P 15/12 (2013.01); G01P 15/18 (2013.01); H01L 41/047 (2013.01); H01L 41/0475 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01);
Abstract

Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weightis columnar or conic. The outline of an outer peripheral portion of a diaphragmhas such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodesare respectively located in four regions partitioned by a first imaginary line Land a second imaginary line L. Four angular velocity sensing electrodesare respectively located in four regions partitioned by a first imaginary diagonal line CLand a second imaginary diagonal line Cl


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