The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Jul. 08, 2015
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventors:
Mari Kusunoki, Yokkaichi, JP;
Shinji Miyazaki, Miegunkawagoe, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); B65D 88/02 (2006.01); C23C 16/448 (2006.01); C23C 16/52 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); B65D 88/022 (2013.01); B65D 88/027 (2013.01); C23C 16/4485 (2013.01); C23C 16/52 (2013.01); Y10T 137/469 (2015.04); Y10T 137/4673 (2015.04); Y10T 137/474 (2015.04); Y10T 137/479 (2015.04); Y10T 137/4841 (2015.04); Y10T 137/4857 (2015.04); Y10T 137/8622 (2015.04); Y10T 137/86187 (2015.04); Y10T 137/86228 (2015.04);
Abstract
According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.