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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9725621 B1

PDFFull Text
Date of Patent:
Aug. 08, 2017

Filed:

Apr. 30, 2014

Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, cmp polishing pad and process for preparing said composition

Applicant:

Cabot Corporation, Boston, MA (US);

Inventors:

Qingling Zhang, Bloomfield Hills, MI (US);

Bennett Greenwood, Somerville, MA (US);

Ravi Sharma, Acton, MA (US);

Geoffrey D. Moeser, Groton, MA (US);

Brian G. Prevo, Portland, OR (US);

Mark J. Hampden-Smith, Chelmsford, MA (US);

Assignee:

Cabot Corporation, Boston, MA (US);

Attorney:
Primary Examiner:

Roberts Culbert

Int. Cl.
CPC ...
B44C 1/22 (2006.01); C09G 1/02 (2006.01); B24B 37/04 (2012.01); C09K 3/14 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/044 (2013.01); C09K 3/1409 (2013.01); C09K 3/1463 (2013.01);
Abstract

CMP processes, tools and slurries utilize composite particles that include core particles having organosilica particles disposed about the core particles. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.

Find Patent Forward Citations

Zhang, Qingling. (2017). Chemical mechanical planarization slurry composition comprising composite particles, process for removing material using said composition, cmp polishing pad and process for preparing said composition (U.S. Patent No. 9725621). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9725621

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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