The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Jun. 12, 2014
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Assignee:
STMICROELECTRONICS S.R.L., Agrate Brianza, IT;
Primary Examiner:
Int. Cl.
CPC ...
G01H 9/00 (2006.01); B81C 1/00 (2006.01); G01H 3/06 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0015 (2013.01); G01H 3/06 (2013.01); G01H 9/00 (2013.01); B81C 2203/075 (2013.01);
Abstract
A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.