The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 08, 2017

Filed:

Dec. 26, 2014
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Izya Kremerman, Los Gatos, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 18/02 (2006.01); B25J 17/02 (2006.01); B25J 9/04 (2006.01); B25J 9/10 (2006.01);
U.S. Cl.
CPC ...
B25J 18/02 (2013.01); B25J 9/042 (2013.01); B25J 9/104 (2013.01); B25J 17/02 (2013.01); H01L 21/67706 (2013.01); H01L 21/67742 (2013.01); H01L 21/67748 (2013.01); Y10T 74/20323 (2015.01);
Abstract

A substrate-transporting robot apparatus is disclosed. The robot apparatus may include an upper arm, a forearm independently rotatable relative to the upper arm, a wrist member independently rotatable relative to the forearm, and an end effector adapted to carry a substrate. In some aspects, the independent rotation is provided by a robot drive assembly having a second driving pulley mounted for rotation on a first driving pulley. In another aspect, robot drive assemblies including base-mounted and web-mounted pulleys are disclosed. Robot drive assemblies and operational methods are provided, as are numerous other aspects.


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