The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Mar. 27, 2012
Applicants:

Jun Sugahara, Yonezawa, JP;

Hidetaka Ohazama, Yonezawa, JP;

Shinsuke Tanaka, Yonezawa, JP;

Hiromu Nara, Yonezawa, JP;

Hiroki Tan, Yonezawa, JP;

Inventors:

Jun Sugahara, Yonezawa, JP;

Hidetaka Ohazama, Yonezawa, JP;

Shinsuke Tanaka, Yonezawa, JP;

Hiromu Nara, Yonezawa, JP;

Hiroki Tan, Yonezawa, JP;

Assignees:

PIONEER CORPORATION, Kawasaki-Shi, Kanagawa, JP;

TOHOKU PIONEER CORPORATION, Tendo-Shi, Yamagata, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); H01L 51/52 (2006.01); B05D 1/26 (2006.01); C23C 16/455 (2006.01); H01L 27/32 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); B05D 1/26 (2013.01); C23C 16/45525 (2013.01); H01L 51/5253 (2013.01); H01L 23/3171 (2013.01); H01L 27/3246 (2013.01); H01L 27/3283 (2013.01); H01L 2924/0002 (2013.01);
Abstract

When a coating filmis formed on a substrateon which elementsare formed, by an ALD film forming method or the like, the coating filmis partially removed in a simple step. A method for manufacturing an electronic device includes a step of coating the substratepartially with a partially coating membera step of forming the elementson the substratea step of forming the coating filmon the substrateto cover the elementsand the partially coating memberand a step of forming a crackA in the coating filmon the partially coating member


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