The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Feb. 01, 2016
Applicant:

Lockheed Martin Corporation, Bethesda, MD (US);

Inventor:

Mahesh Kumar, Cherry Hill, NJ (US);

Assignee:

LOCKHEED MARTIN CORPORATION, Bethesda, DE (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 23/66 (2006.01); H01L 23/373 (2006.01); H01L 23/538 (2006.01); H01L 27/06 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/66 (2013.01); H01L 23/3738 (2013.01); H01L 23/5384 (2013.01); H01L 23/5386 (2013.01); H01L 24/09 (2013.01); H01L 24/49 (2013.01); H01L 27/0605 (2013.01); H01L 27/0629 (2013.01); H01L 2223/6611 (2013.01); H01L 2223/6616 (2013.01); H01L 2223/6655 (2013.01); H01L 2223/6683 (2013.01); H01L 2224/4918 (2013.01); H01L 2224/49176 (2013.01); H01L 2924/01014 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01079 (2013.01); H01L 2924/1033 (2013.01); H01L 2924/10329 (2013.01); H01L 2924/10344 (2013.01); H01L 2924/13064 (2013.01); H01L 2924/1423 (2013.01);
Abstract

A radio frequency (RF) integrated circuit includes a first layer of semiconductor material in which a high electron mobility transfer (HEMT) device is formed. A semiconductor heat spreader substrate supports the first layer of semiconductor material. A pair of matching circuits are electrically connected to the HEMT device, wherein the pair of matching circuits are supported on a semiconductor substrate of a semiconductor material different than the semiconductor material of the first semiconductor heat spreader substrate. The first layer of semiconductor material and the first semiconductor heat spreader substrate have a thickness that is less than a second thickness of the semiconductor substrate supporting the pair of matching circuits.


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