The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
Dec. 03, 2014
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Andrew Brian Nelson, Melissa, TX (US);
Richard A. Stice, Plano, TX (US);
Joe Tran, Flower Mound, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 21/02164 (2013.01); H01L 21/02266 (2013.01); H01L 21/02271 (2013.01); H01L 21/02274 (2013.01); H01L 21/02362 (2013.01); H01L 21/31053 (2013.01);
Abstract
A method of filling STI trenches with dielectric with reduced particle formation. A method of depositing unbiased STI oxide on an integrated circuit during STI trench fill that reduces STI defects during STI CMP.