The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Oct. 28, 2011
Applicants:

Feng Liu, Salt Lake City, UT (US);

Gerald Stringfellow, Salt Lake City, UT (US);

Junyi Zhu, Lakewood, CO (US);

Inventors:

Feng Liu, Salt Lake City, UT (US);

Gerald Stringfellow, Salt Lake City, UT (US);

Junyi Zhu, Lakewood, CO (US);

Assignee:

University of Utah Research Foundation, Salt Lake City, UT (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/36 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/36 (2013.01); H01L 21/0262 (2013.01); H01L 21/02538 (2013.01); H01L 21/02543 (2013.01); H01L 21/02579 (2013.01); H01L 21/02581 (2013.01); Y10S 117/913 (2013.01);
Abstract

Methods of doping a semiconductor film are provided. The methods comprise epitaxially growing the III-V semiconductor film in the presence of a dopant, a surfactant capable of acting as an electron reservoir, and hydrogen, under conditions that promote the formation of a III-V semiconductor film doped with the p-type dopant. In some embodiments of the methods, the epitaxial growth of the doped III-V semiconductor film is initiated at a first hydrogen partial pressure which is increased to a second hydrogen partial pressure during the epitaxial growth process.


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