The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Jul. 25, 2016
Applicant:

Tescan Brno, S.r.o., Brno, CZ;

Inventors:

Libor Sedlacek, Brno, CZ;

Jaroslav Jiruse, Blansko, CZ;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/40 (2006.01); H01J 49/14 (2006.01); H01J 49/04 (2006.01); G01N 23/225 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 49/401 (2013.01); G01N 23/2258 (2013.01); H01J 49/142 (2013.01); H01J 37/26 (2013.01);
Abstract

A device for mass spectrometry in continuous operation can be equipped with a focused electron beam source or laser radiation source. It can further include a vacuum chamber, a stage for placing the specimen, and an ion beam column with a plasma source for producing a primary ion beam and a secondary ion mass spectrometer for secondary ion analysis. The ion beam column is connected to an inert gas source and to a reactive gas source and is modified for simultaneous introduction of at least two gases from the inert gas source and reactive gas source. The secondary ion mass spectrometer is of an orthogonal Time-of-Flight type to ensure the function with the ion beam column in continuous operation.


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