The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Nov. 16, 2015
Applicants:

Agc Flat Glass North America, Inc., Alpharetta, GA (US);

Asahi Glass Co., Ltd., Tokyo, JP;

Agc Glass Europe S.a., Gosselies, BE;

Inventors:

John Chambers, San Francisco, CA (US);

Peter Maschwitz, Sebastopol, CA (US);

Assignees:

AGC FLAT GLASS NORTH AMERICA, INC., Alpharetta, GA (US);

ASAHI GLASS CO., LTD., Tokyo, JP;

AGC GLASS EUROPE S.A., Gosselies, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32596 (2013.01); C23C 16/50 (2013.01); H01J 37/32568 (2013.01); H01J 37/32587 (2013.01);
Abstract

A method of producing a plasma is provided. The method includes providing at least three hollow cathodes, including a first hollow cathode, a second hollow cathode, and a third hollow cathode. Each hollow cathode has a plasma exit region. The method further includes providing a source of power capable of producing multiple output waves, including a first output wave, a second output wave, and a third output wave. The first output wave and the second output wave are out of phase, the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of phase. Each hollow cathode is electrically connected to the source of power such that the first hollow cathode is electrically connected to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third hollow cathode is electrically connected to the third output wave. Electrical current flows between the at least three hollow cathodes that are out of electrical phase. A plasma is generated between the hollow cathodes.


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