The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
Dec. 11, 2015
International Business Machines Corporation, Armonk, NY (US);
Ning Lu, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
One embodiment provides a method of building a wire resistance corner model for an interconnect metal level in a semiconductor device. The method comprises determining nominal on-wafer widths and wire thicknesses at minimum and maximum design widths of the interconnect metal level, and determining standard deviations for global variations in on-wafer width and wire thickness. The method further comprises determining maximum and minimum statistical corner values for interconnect wire resistance. A first corner solution that minimizes a maximum absolute difference between a model corner value and a statistical corner value of the maximum statistical corner values is computed. A second corner solution that minimizes a maximum absolute difference between a model corner value and a statistical corner value of the minimum statistical corner values is computed.