The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2017
Filed:
Oct. 18, 2013
Applicant:
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;
Inventors:
Assignees:
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., München, DE;
SICO Technology GmbH, Bad Bleiberg, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C02F 1/32 (2006.01); H01J 61/94 (2006.01); H01J 65/04 (2006.01); H01J 61/16 (2006.01); H01J 61/20 (2006.01);
U.S. Cl.
CPC ...
C02F 1/325 (2013.01); H01J 61/16 (2013.01); H01J 61/20 (2013.01); H01J 61/94 (2013.01); H01J 65/04 (2013.01); H01J 65/042 (2013.01); C02F 2201/3221 (2013.01); C02F 2201/3227 (2013.01); C02F 2201/3228 (2013.01); C02F 2303/04 (2013.01);
Abstract
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (), wherein the chamber has at least one area () transparent to UV light and/or VUV light. A first group () of plasma chambers is filled with an ionizable gas containing mercury and a second group () of plasma chambers is filled with a gas that forms excimers when suitably excited.