The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Nov. 20, 2015
Applicants:

Soitec, Bernin, FR;

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Didier Landru, Champ Pres Froges, FR;

Capucine Delage, La Croix de la Rochette, FR;

Franck Fournel, Villard-Bonnot, FR;

Elodie Beche, Grenoble, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); B32B 37/00 (2006.01); H01L 21/20 (2006.01); B32B 38/00 (2006.01); H01L 21/324 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
B32B 37/0007 (2013.01); B32B 38/0036 (2013.01); H01L 21/2007 (2013.01); H01L 21/324 (2013.01); H01L 21/76254 (2013.01); B32B 2038/0048 (2013.01); B32B 2250/02 (2013.01); B32B 2307/728 (2013.01); B32B 2309/60 (2013.01); B32B 2313/00 (2013.01); B32B 2457/14 (2013.01);
Abstract

A method for assembling two substrates by molecular adhesion comprises: a first step (a) of putting first and second substrates in close contact in order to form an assembly having an assembly interface; a second step (b) of reinforcing the degree of adhesion of the assembly beyond a threshold adhesion value at which water is no longer able to diffuse along the assembly interface. The method also comprises a step (c) of anhydrous treatment of the first and second substrates in a treatment atmosphere having a dew point below −10° C., and control of the dew point of a working atmosphere to which the first and second substrates are exposed from the anhydrous treatment step (c) until the end of the second step (b) so as to limit or prevent the appearance of bonding defects at the assembly interface.


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