The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 01, 2017

Filed:

Jun. 03, 2013
Applicant:

Mitsubishi Electric Research Laboratories, Inc., Cambridge, MA (US);

Inventors:

Abraham M Goldsmith, Boston, MA (US);

Scott A Bortoff, Brookline, MA (US);

Vijay Shilpiekandula, Saratoga Springs, NY (US);

Alan Sullivan, Middleton, MA (US);

William S Yerazunis, Acton, MA (US);

John C Barnwell, III, Leominster, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/25 (2006.01); B23K 26/00 (2014.01); H01S 3/00 (2006.01); G03F 9/00 (2006.01); G01J 1/42 (2006.01);
U.S. Cl.
CPC ...
B23K 26/00 (2013.01); G01B 11/2504 (2013.01); G01J 1/4257 (2013.01); G03F 9/7019 (2013.01); H01S 3/0014 (2013.01);
Abstract

A method calibrates a laser processing machine by commanding a scan head to direct a laser beam to a desired position, then senses an actual position of the laser beam directly using a position sensitive detector (PSD) after the scan head is positioned. A relative position between the scan head and PSD is altered using one or more linear actuators. A position feedback loop is closed around the linear actuators so that the relative position of the laser beam on the PSD is reduced to zero. The actual position of the laser spot is then measured indirectly by encoders attached to linear axes of the laser processing machine. The actual position is stored in a memory. An error is determined as a difference between the desired position and the actual position. Compensation coefficients are determined from the error and stored for later use during operation of the laser processing machine.


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