The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2017

Filed:

Dec. 12, 2014
Applicant:

Globalfoundries U.s. 2 Llc, Hopewell Junction, NY (US);

Inventors:

David Berman, San Jose, CA (US);

Dylan J. Boday, Tucson, AZ (US);

Icko E. T. Iben, Santa Clara, CA (US);

Wayne I. Imaino, San Jose, CA (US);

Stephen L. Schwartz, Tucson, AZ (US);

Anna W. Topol, Jefferson Valley, NY (US);

Daniel J. Winarski, Tucson, AZ (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 35/00 (2006.01); G01R 33/00 (2006.01); G01R 33/12 (2006.01); G01N 27/72 (2006.01); G01R 33/09 (2006.01); G01N 27/74 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0035 (2013.01); G01N 27/72 (2013.01); G01R 33/09 (2013.01); G01R 33/1269 (2013.01); G01R 35/00 (2013.01); G01R 35/005 (2013.01); G01N 27/745 (2013.01);
Abstract

According to one embodiment, a calibration assembly includes an outer layer having at least one calibration trench extending along a y-axis, and an encapsulation layer within the calibration trench. The encapsulation layer has a plurality of nanoparticles spaced apart along said y-axis of said at least one calibration trench. Each of said plurality of nanoparticles are provided at known y-axis locations in said calibration trench, and each of the plurality of nanoparticles have a known magnetic property.


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