logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9714462 B1

PDFFull Text
Date of Patent:
Jul. 25, 2017

Filed:

Oct. 08, 2014

Vacuum pre-wetting apparatus and methods

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Robert B. Moore, Bigfork, MT (US);

Vincent Steffan Francischetti, Columbia Falls, MT (US);

Assignee:

APPLIED Materials, Inc., Santa Clara, CA (US);

Attorneys:

Kenneth H. Ohriner

Perkins Coie LLP

Primary Examiner:

Michael Barr

Assistant Examiner:

Jason Riggleman

Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/02 (2006.01); C23C 16/44 (2006.01); C23C 18/16 (2006.01); C25D 5/34 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); C23C 18/18 (2006.01);
U.S. Cl.
CPC ...
C23C 16/0227 (2013.01); C23C 16/44 (2013.01); C23C 18/163 (2013.01); C23C 18/1619 (2013.01); C23C 18/1803 (2013.01); C23C 18/1851 (2013.01); C25D 5/34 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01);
Abstract

A processing apparatus may include a down-facing substrate processing chamber fixed at acute angle to horizontal. A chuck plate on a platform may pivot from an open position wherein the platform is at an acute angle to the processing chamber, to a parallel position wherein the platform is parallel to the processing chamber. The chuck plate may then be moved linearly into sealing engagement with the processing chamber. A chuck holder may be provided on the platform to hold the chuck in place.

Find Patent Forward Citations

Moore, Robert. (2017). Vacuum pre-wetting apparatus and methods (U.S. Patent No. 9714462). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9714462

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…