The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Aug. 16, 2016
Applicant:

Northeastern University, Boston, MA (US);

Inventors:

Matteo Rinaldi, Boston, MA (US);

Cristian Cassella, East Boston, MA (US);

Zhenyun Qian, Boston, MA (US);

Yu Hui, Billerica, MA (US);

Assignee:

Northeastern University, Boston, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/205 (2006.01); G01J 5/44 (2006.01); H03H 9/02 (2006.01); G01J 5/04 (2006.01); H01L 41/18 (2006.01); H03H 9/13 (2006.01); H03H 9/24 (2006.01); H03H 9/15 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02244 (2013.01); G01J 5/046 (2013.01); G01J 5/44 (2013.01); H01L 41/18 (2013.01); H03H 3/02 (2013.01); H03H 9/13 (2013.01); H03H 9/15 (2013.01); H03H 9/17 (2013.01); H03H 2003/027 (2013.01); H03H 2009/155 (2013.01); H03H 2009/241 (2013.01);
Abstract

A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).


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