The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Dec. 21, 2012
Applicant:

3m Innovative Properties Company, St. Paul, MN (US);

Inventors:

Martin B. Wolk, Woodbury, MN (US);

Michael Benton Free, Saint Paul, MN (US);

Margaret M. Vogel-Martin, Forrest Lake, MN (US);

Evan L. Schwartz, Saint Paul, MN (US);

Mieczyslaw H. Mazurek, Roseville, MN (US);

Terry O. Collier, Woodbury, MN (US);

Assignee:

3M INNOVATIVE PROPERTIES COMPANY, Saint Paul, MN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 3/26 (2006.01); H01L 51/00 (2006.01); G03F 7/16 (2006.01); G03F 7/34 (2006.01); B82Y 40/00 (2011.01); H01L 27/32 (2006.01); G03F 7/00 (2006.01); C03C 17/28 (2006.01); C03C 17/34 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0097 (2013.01); B32B 3/263 (2013.01); B82Y 40/00 (2013.01); C03C 17/28 (2013.01); C03C 17/34 (2013.01); G03F 7/0002 (2013.01); G03F 7/161 (2013.01); G03F 7/34 (2013.01); H01L 27/322 (2013.01); H01L 27/3244 (2013.01); H01L 51/0094 (2013.01); B81C 2201/0191 (2013.01); H01L 51/004 (2013.01); H01L 2221/68368 (2013.01); H01L 2227/326 (2013.01); H01L 2251/301 (2013.01); H01L 2251/5338 (2013.01); H01L 2251/5369 (2013.01); Y10T 428/24521 (2015.01);
Abstract

A transfer tape is disclosed that includes a carrier, a template layer having a first surface applied to the carrier and having a second surface opposite the first surface, wherein the second surface comprises a non-planar structured surface, a release coating disposed upon the non-planar structured surface of the template layer, and a backfill layer disposed upon and conforming to the non-planar structured surface of the release coating. In some embodiments, the backfill layer includes a silsesquioxane such as polyvinyl silsesquioxane. The disclosed transfer tape can be used to transfer replicated structures to a receptor substrate.


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