The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Sep. 24, 2014
Applicant:
Cavendish Kinetics, Inc., San Jose, CA (US);
Inventors:
Mickael Renault, San Jose, CA (US);
Vikram Joshi, Mountain View, CA (US);
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Thomas L. Maguire, Santa Clara, CA (US);
Richard L. Knipe, McKinney, TX (US);
Assignee:
Cavendish Kinetics, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01G 5/16 (2006.01); H01H 59/00 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01G 5/011 (2006.01);
U.S. Cl.
CPC ...
H01G 5/16 (2013.01); B81B 3/0086 (2013.01); B81C 1/00166 (2013.01); H01G 5/011 (2013.01); H01H 59/0009 (2013.01); B81B 2201/0221 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0104 (2013.01); B81C 2201/0109 (2013.01);
Abstract
The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.