The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2017

Filed:

Apr. 11, 2013
Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Tatsushi Nomura, Sagamihara, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G02B 21/06 (2006.01); G01B 11/24 (2006.01); G02B 21/16 (2006.01); G01N 21/64 (2006.01);
U.S. Cl.
CPC ...
G02B 21/06 (2013.01); G01B 11/24 (2013.01); G02B 21/16 (2013.01); G01N 21/6458 (2013.01); G02B 2207/113 (2013.01);
Abstract

A structured illumination apparatus includes a light modulator being disposed in an exit flux of light from a light source and in which a sonic wave propagation path is arranged in a direction traversing the exit flux of light; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; and an illuminating optical system making mutually different diffracted components of the exit flux of light passed through the sonic wave propagation path to be interfered with each other, and forming interference fringes of the diffracted components on an observational object.


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