The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Aug. 31, 2012
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Mickael Renault, San Jose, CA (US);
Vikram Joshi, Mountain View, CA (US);
Richard L. Knipe, McKinney, TX (US);
Anartz Unamuno, Dresden, DE;
Robertus Petrus Van Kampen, S-Hertogenbosch, NL;
Mickael Renault, San Jose, CA (US);
Vikram Joshi, Mountain View, CA (US);
Richard L. Knipe, McKinney, TX (US);
Anartz Unamuno, Dresden, DE;
CAVENDISH KINETICS, INC., San Jose, CA (US);
Abstract
Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.