The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2017
Filed:
Dec. 01, 2014
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Takahiro Yatsu, Tokyo, JP;
Assignee:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); F04D 19/04 (2006.01); F04B 37/16 (2006.01); B01D 8/00 (2006.01); F04B 37/02 (2006.01); F04B 37/14 (2006.01);
U.S. Cl.
CPC ...
B01D 8/00 (2013.01); F04B 37/02 (2013.01); F04B 37/14 (2013.01);
Abstract
In a cold trap provided between a vacuum chamber and a vacuum pump for the vacuum chamber, a cold panel is located in an exhaust passage from an exhaust port of the vacuum chamber to an intake port of the vacuum pump. A cold panel chamber includes an entrance that connects the exhaust passage to the exhaust port of the vacuum chamber, and an exit that connects the exhaust passage to the intake port of the vacuum pump. The exit is provided so as to be eccentric with respect to the entrance.