The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2017
Filed:
Dec. 06, 2013
Sharp Kabushiki Kaisha, Osaka-shi, Osaka, JP;
Hiroshi Sasaki, Osaka, JP;
Sharp Kabushiki Kaisha, Sakai, JP;
Abstract
To suppress or prevent erosion (decrease in film thickness), water absorption, or cracking of a DBR film surface in washing or etching treatment in a downstream process. The DBR film structure of a DBR filmD includes a pair of or a plurality of pairs of a deposited SiOfilm and a deposited TiOfilm. Such a top layer of DBR film structures has hitherto been a deposited SiOfilm that provides high reflectance. In order to prevent erosion while maintaining high reflectance, the top layer herein is a high-refractive-index thin film (for example, a deposited TiOfilm) having a thickness in the range of 1 to 13 nm, and a tapered DBR end portion (a slope having a taper angle in the range of 15 to 45 degrees) is formed by vapor deposition in a lift-off process. The high-refractive-index thin film is overlaid with a reflective metal filmD serving as a first layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile