The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2017
Filed:
Feb. 28, 2013
Applicant:
Texas Instruments Deutschland Gmbh, Freising, DE;
Inventors:
Assignee:
TEXAS INSTRUMENTS DEUTSCHLAND GMBH, Freising, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); H01L 49/02 (2006.01); H01L 27/08 (2006.01); H01L 27/01 (2006.01);
U.S. Cl.
CPC ...
H01L 28/20 (2013.01); H01L 27/0802 (2013.01); H01L 27/016 (2013.01); H01L 28/24 (2013.01);
Abstract
An integrated circuit contains three thin film resistors over a dielectric layer. The first resistor body includes only a bottom thin film layer and the first resistor heads include the bottom thin film layer, a middle thin film layer and a top thin film layer. The second resistor body and heads include all three thin film layers. The third resistor body does not include the middle thin film layer. The three resistors are formed using two etch masks.