The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2017

Filed:

Nov. 23, 2015
Applicant:

Coolstar Technology, Inc., Sunnyvale, CA (US);

Inventors:

Shuming Xu, Sunnyvale, CA (US);

Wenhua Dai, San Jose, CA (US);

Assignee:

CoolStar Technology, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 29/78 (2006.01); H01L 27/06 (2006.01); H01L 29/66 (2006.01); H01L 49/02 (2006.01); H01L 23/64 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0629 (2013.01); H01L 21/8234 (2013.01); H01L 23/645 (2013.01); H01L 28/10 (2013.01); H01L 28/60 (2013.01); H01L 29/66484 (2013.01); H01L 29/66681 (2013.01); H01L 29/7817 (2013.01); H01L 29/7831 (2013.01);
Abstract

A method of integrating at least one passive component and at least one active power device on a same substrate includes: forming a substrate having a first resistivity value associated therewith; forming a low-resistivity region having a second resistivity value associated therewith in the substrate, the second resistivity value being lower than the first resistivity value; forming the at least one active power device in the low-resistivity region; forming an insulating layer over at least a portion of the at least one active power device; and forming the at least one passive component on an upper surface of the insulating layer above the substrate having the first resistivity value, the at least one passive component being disposed laterally relative to the at least one active power device and electrically connected with the at least one active power device.


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