The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2017

Filed:

Feb. 03, 2016
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Ji-Won Choi, Seoul, KR;

Won-Kook Choi, Seoul, KR;

Jin Sang Kim, Seoul, KR;

Haena Yim, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 15/04 (2006.01); C23C 14/06 (2006.01); H01B 1/02 (2006.01); H01L 29/43 (2006.01); H01L 31/0224 (2006.01); C01G 19/02 (2006.01); H01L 31/18 (2006.01); H01L 33/42 (2010.01);
U.S. Cl.
CPC ...
H01B 1/02 (2013.01); C01G 19/02 (2013.01); H01L 29/43 (2013.01); H01L 31/022466 (2013.01); H01L 31/1884 (2013.01); C01P 2002/50 (2013.01); C01P 2002/54 (2013.01); H01L 33/42 (2013.01); Y02E 10/50 (2013.01);
Abstract

Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of MnSnO (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of MnSnO (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of MnSnO (0<x≦0.055) deposited on the metal thin film.


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