The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2017

Filed:

Dec. 12, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Kentaro Nagai, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03H 3/00 (2006.01); G01N 23/04 (2006.01); G21K 1/06 (2006.01); G01N 23/20 (2006.01); H01J 37/252 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G01N 23/20 (2013.01); G21K 1/06 (2013.01); H01J 37/252 (2013.01); H01J 2237/221 (2013.01);
Abstract

The present invention relates to an object information obtaining apparatus that obtains information about a phase image of an object using information about an interference pattern produced by a shearing interferometer, the interference pattern being formed by an electromagnetic wave or electron beam passed through or reflected by the object. The apparatus includes a first obtaining unit configured to obtain information about a differential phase image of the object using the information about the interference pattern, a second obtaining unit configured to obtain information about contrast in each region of the interference pattern, a third obtaining unit configured to weight the information about the differential phase image using the information about the contrast to obtain information about a weighted differential phase image, and a fourth obtaining unit configured to integrate the information about the weighted differential phase image to obtain the information about the phase image of the object.


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