The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 11, 2017

Filed:

Dec. 19, 2016
Applicant:

Amo Manufacturing Usa, Llc, Santa Ana, CA (US);

Inventors:

Ihor Berezhnyy, Los Gatos, CA (US);

Anthony Tang, San Jose, CA (US);

Henry Price, San Jose, CA (US);

Assignee:

AMO Manufacturing USA, LLC, Santa Ana, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/00 (2006.01); G01B 11/24 (2006.01); G01J 1/04 (2006.01);
U.S. Cl.
CPC ...
G01B 11/24 (2013.01); G01J 1/0411 (2013.01); G01J 1/0488 (2013.01);
Abstract

Embodiments generally describe systems, devices, and methods for focusing and calibrating beam profilers. A test object is provided that may include an internal housing rotatable within an external housing. The internal housing may house a light source, a collimator, a filter, and/or a diffuser. A plate may be mounted to the internal housing and may include a plurality of markings. In some embodiments, to focus a beam profiler, the test object may be positioned adjacent the converter plate of a beam profiler. Marker images may be captured and a focus quality may be assessed therefrom. A position of the converter, objective, and/or camera of the beam profiler may be adjusted based on the focus quality. To calibrate, images of the markings in several rotational positions may be captured and used for calibration. The markings may be rotated to several positions by rotating the internal housing relative to the external housing.


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