The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2017
Filed:
Feb. 16, 2014
Applicant:
Brooks Ccs Gmbh, Radolfzell, DE;
Inventor:
Lutz Rebstock, Gaienhofen, DE;
Assignee:
Brooks CCS GmbH, , DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B25J 9/00 (2006.01); B25J 15/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); B25J 9/00 (2013.01); B25J 15/0052 (2013.01); H01L 21/68707 (2013.01); Y10S 901/31 (2013.01);
Abstract
An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.