The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 04, 2017

Filed:

Nov. 25, 2015
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventors:

Yasuhiro Iguchi, Yokohama, JP;

Youichi Nagai, Takarazuka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/109 (2006.01); H01L 33/30 (2010.01); H01L 31/00 (2006.01); H01L 27/144 (2006.01); H01L 31/0352 (2006.01); H01L 31/103 (2006.01); H01L 31/105 (2006.01); H01L 31/18 (2006.01); H01L 31/0304 (2006.01);
U.S. Cl.
CPC ...
H01L 31/109 (2013.01); H01L 27/1446 (2013.01); H01L 31/00 (2013.01); H01L 31/03046 (2013.01); H01L 31/035236 (2013.01); H01L 31/035263 (2013.01); H01L 31/105 (2013.01); H01L 31/1035 (2013.01); H01L 31/1844 (2013.01); H01L 33/30 (2013.01); Y02E 10/544 (2013.01);
Abstract

A method produces a light-receiving device by growing a light-receiving layer having an undoped multi-quantum well structure; growing a cap layer on the light-receiving layer while the cap layer is doped with a p-type impurity during its growth; growing a mesa structure; growing a protective film on surfaces of the mesa structure; and annealing to form a p-n junction. The mesa structure is defined by a surrounding trench. Alternatively, a selective growth mask can be formed on the light-receiving layer whereafter the cap layer is grown on the light-receiving layer by use of the mask. In the alternative, the p-n junction is formed by diffusing p-type impurity from a p-type contact layer of the cap layer through a concentration adjusting layer thereof to the light-receiving layer.


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