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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9698244 B1

PDFFull Text
Expired
Date of Patent:
Jul. 04, 2017

Filed:

Mar. 07, 2016

Semiconductor devices and methods of fabricating the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Jinbum Kim, Seoul, KR;

Jaeyoung Park, Yongin-si, KR;

Donghun Lee, Daegu, KR;

Jeongho Yoo, Seongnam-si, KR;

Jieon Yoon, Hwaseong-si, KR;

Kwan Heum Lee, Suwon-si, KR;

Choeun Lee, Pocheon-si, KR;

Bonyoung Koo, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:

F. Chau & Associates, LLC

Primary Examiner:

Evren Seven

Assistant Examiner:

S M. S Imtiaz

Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/04 (2006.01); H01L 29/12 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/40 (2006.01); H01L 21/30 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66636 (2013.01); H01L 21/3003 (2013.01); H01L 29/045 (2013.01); H01L 29/12 (2013.01); H01L 29/401 (2013.01); H01L 29/41766 (2013.01); H01L 29/42356 (2013.01); H01L 29/66545 (2013.01);
Abstract

A method of fabricating a semiconductor device is provided as follows. A source/drain pattern is formed on a substrate. The source/drain pattern contains silicon atoms and germanium atoms. At least one germanium atom is removed from the germanium atoms of the source/drain pattern.

Find Patent Forward Citations

Kim, Jinbum. (2017). Semiconductor devices and methods of fabricating the same (U.S. Patent No. 9698244). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9698244

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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