The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Sep. 09, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Nir Merry, Mountain View, CA (US);
Leon Volfovski, Mountain View, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); H01L 23/34 (2006.01); H01L 21/683 (2006.01); H05B 3/28 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 23/34 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/683 (2013.01); H01L 21/68792 (2013.01); H05B 3/283 (2013.01); H01L 2924/0002 (2013.01); Y10T 29/49083 (2015.01);
Abstract
Methods and apparatus of substrate supports having temperature profile control are provided herein. In some embodiments, a substrate support includes: a plate having a substrate receiving surface and an opposite bottom surface; and a shaft having a first end comprising a shaft heater and a second end, wherein the first end is coupled to the bottom surface. Methods of making a substrate support having temperature profile control are also provided.