The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Nov. 05, 2015
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Silvia R. Aguilar, San Jose, CA (US);
Scott Wong, Sunnyvale, CA (US);
Derek J. Witkowicki, Newark, CA (US);
Richard H. Gould, Fremont, CA (US);
Candi Kristoffersen, San Jose, CA (US);
Brandon Senn, Molalla, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67778 (2013.01);
Abstract
A substrate cassette loading system for docking substrate cassettes to a substrate processing system is provided. A plurality of ports passes substrates into the substrate processing system, wherein a first port of the plurality of ports is vertically above a second port of the plurality of ports. A plurality of cassette loaders provides substrate cassettes to the plurality of ports.