The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Mar. 12, 2015
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, Tokyo, JP;
Inventors:
Yuuichi Kuroda, Mie, JP;
Masaki Hirano, Mie, JP;
Tsunekazu Yasutake, Kanagawa, JP;
Rempei Nakata, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67376 (2013.01); H01L 21/67775 (2013.01);
Abstract
In accordance with an embodiment, a substrate storage container includes first and second cases, a lid and a moving unit. The first case is provided with an opening to take in or out a substrate. The lid closes the opening. The second case can move in a first direction crossing a surface of the first case. The opening is provided on the surface. The moving unit moves the second case in the first direction in response to the opening of the lid.