The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Jun. 12, 2013
Applicant:
Technische Universiteit Delft, Delft, NL;
Inventors:
Assignee:
Technische Universiteit Delft, Delft, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/14 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/14 (2013.01); H01J 37/28 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/2448 (2013.01);
Abstract
The invention relates to an apparatus for inspecting a surface of a sample, wherein the apparatus comprises: at least one charged particle source for generating an array of primary charged particle beams, a condenser lens for directing all charged particle beams to a common cross-over, a lens system for directing the primary charged particle beams from the common cross-over towards the sample surface and for focusing all primary charged particle beams into an array of individual spots on the sample surface, and a position sensitive secondary electron detector positioned at least substantially in or near a plane comprising said common cross-over.