The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
May. 16, 2014
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Hae-Sang Park, Seoul, KR;
Young-Hak Lee, Suwon-si, KR;
Jung-Hee Kim, Seongnam-si, KR;
Heui-Sik Jeon, Suwon-si, KR;
Eunjeong Lucy Park, Seoul, KR;
Sungzoon Cho, Seoul, KR;
Jooseoung Park, Seoul, KR;
Jiwon Yang, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;
SEOUL NATIONAL UNIVERSITY R & DB FOUNDATION, Seoul, KR;
Abstract
An apparatus and method of segmenting sensor data are provided. The apparatus includes a sensor, a first segmentation unit, a continuity evaluation unit, a second segmentation unit, and a segmentation determination unit. The sensor collects sensor data for a process of the semiconductor manufacturing facility. The first segmentation unit extracts a variation point of the sensor data to perform an abnormal difference (AD) segmentation on the sensor data based on the at least one variation point. The continuity evaluation unit evaluates a continuity ratio of the sensor data. The second segmentation unit performs a free-knot spline (FS) segmentation on the sensor data when the continuity ratio exceeds a reference ratio. The segmentation determination unit compares the AD segmentation result with the FS segmentation result and to select one of the results on the comparison result.